Alyuminiy nitridli keramik chuck yuqori haroratli jarayonlar

Apr 20, 2025 Xabar QOLDIRISH

Alyuminiy nitrid (alyn) reaamik chakchalar yuqori haroratli jarayonlar

 

Alohida haroratli termal va mexanik xususiyatlari tufayli yuqori haroratli yarim semizgor va sanoat dasturlarida Aln Copole Cons Excel:

AFROSE harorat qarshiligi - 1000 daraja (inert atmosferalarida), aluminani (800 daraja) va polimerlar bilan cheklangan.

Thermal Shock Resilience–Withstands rapid thermal cycling (ΔT >500 diplom \/ sek, yoriqsiz, chip ishlab chiqarishda tez terini qayta ishlash (RMTP) uchun tanqidiydir.

Kam termal o'sish - CTE 4.5 PPM \/ K silikon grammoni (2,6 PPM \/ k) bilan yaqinroq mos keladi (2,6 PPM \/ K) isitish paytida gofret pardani minimallashtirish.

Yuqori issiqlik o'tkazuvchanligi - 170-200 w \/ mk issiqlik tarqalishi yagona to'sig'ini saqlaydi

Oxidation Resistance–Forms a protective Al₂O₃ surface layer at >Airda 800 daraja, tarkibiy yaxlitlikni saqlash.

Plazma va kimyoviy barqarorlik - Nargen Plasmas (CLISH \/ F₂) va MOCVD xonalarida metall organik prekursorlar 900 daraja.

Asosiy dasturlar:

EUU Litografiya bosqichlari (5NM kalitlarga qaraganda kam yoki unga teng)

Gan Epitaxy reaktorlari (800-1100}

Quvvat qurilmasi Enrealing (700 daraja, 5 min tsikl)

Nol burilish va<0.1μm thermal deformation, AlN chucks enable high-precision processing in advanced semiconductor fabs and LED production. Their 10x longer lifespan than traditional materials reduces downtime in 24/7 wafer fabs.

Ko'proq uchunAlyuminiy nitrid caramik chakMa'lumot, iltimos, quyidagi www.ceramiceMumes.com saytiga tashrif buyuring

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